Fully automatic Wafer sorting equipment
• ASW6000 series wafer sorting equipment supports wafer mutual transfer between 2-6 PORTs, is compatible with SEMI standard Foup, Fosb and Open Cassette, and is equipped with microenvironment clean kee
• ASW6000 series wafer sorting equipment supports wafer mutual transfer between 2-6 PORTs, is compatible with SEMI standard Foup, Fosb and Open Cassette, and is equipped with microenvironment clean kee